Abstract
In the current microwelding process using femtosecond (fs) laser between dissimilar materials, surface polishing and pressure assistance, so-called optical contact, are believed necessary. In this paper, direct welding of soda lime glass and Kovar alloy using a fs laser is investigated to overcome the limit of optical contact. The processing of fs laser welding is comprehensively studied by varying the laser power, welding velocity and the number of welding. The shear joining strength is as high as 2 MPa. The cross-section of glass-Kovar alloy joints, the elemental diffusion and the fracture behavior of welded joints were studied. The results show that the fs laser irradiates the surface of Kovar alloy, micron/nanometer-sized metal particles are generated. These particles perform the role as an adhesive part in the welding process. It is believed that the Si atoms diffuses to Kovar alloy from the glass and partially replaces the Fe2+ ions on the surface of Kovar alloy, indicating that the mixing and interdiffusion of materials have occurred during the welding process. Finally, the welded sample was tested and has excellent water resistance and sealing property. Furthermore, to justify that this method can be applied to other stack ups, the glass-copper, the glass-Al6063 and sapphire-ceramic are also welded together. This work greatly simplifies the fs laser microwelding process and promotes its industrial applications, such as optoelectronic devices, medical devices and MEMS.
摘要
飞秒激光由于能有效避免热扩散、热损伤以及防止热应力产生裂纹和溅射物等优点而广泛应用 于微纳米尺度材料连接领域。但目前使用飞秒激光焊接异种材料时,两种材料之间一般需达到光学接 触。为了达到上述要求,通常认为材料表面抛光和压力辅助是必要的。本文使用飞秒激光直接焊接钠 钙玻璃和可伐合金,克服了光学接触的限制。通过改变激光功率、焊接速度和焊接次数来优化焊接工 艺参数。接头的剪切连接强度可到达2 MPa。利用基恩士显微镜、扫描电子显微镜(SEM)、能谱分析 仪(EDS)分析了玻璃-可伐合金接头的截面、元素扩散行为和接头的断裂行为。结果表明,飞秒激光辐 照金属材料表面后,会在表面产生微纳米级微小颗粒,这种微小颗粒可被认为是焊接过程中的粘合 剂。焊接区硅和氧元素有明显的变化,玻璃表面的元素Si 进入可伐合金表面,部分取代了可伐合金表 面的Fe2+,表明在激光照射过程中发生了物质的混合和相互扩散。同时也对飞秒激光焊接玻璃和可伐 合金的过程中等离子体逃逸区的形成机制进行了分析。最后,对焊后样品进行了密封性测试,发现其 具有良好的耐水性和密封性。为了证明这种方法可以应用于其他材料,玻璃-铜,玻璃-Al6063,蓝宝 石-陶瓷也被焊接到一起。这项工作有望简化飞秒激光微焊接工艺,并促进其在工业上的应用。
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Funding
Project(GKZY2119502) supported by the Special Funds for Local Scientific and Technological Development guided by the Central Government, China; Project(JGY2021001) supported by the Innovation Project of Guangxi Graduate Education, China
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The overarching research goals were developed by LONG Yu, JI Chang-hao, and HUANG Yu-jia. JI Chang-hao provided the concept, conducted the literature review and wrote the first draft of the manuscript. JI Chang-hao, CHEN Xu and JIANG Ji-yan analyzed the measured data. LONG Yu, HUANG Yu-jia, CHEN Xu, JIANG Ji-yan and GUO Zhi-jun edited the draft of manuscript. All authors replied to reviewers’ comments and revised the final version.
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The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.
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Ji, Ch., Huang, Yj., Chen, X. et al. Direct microwelding of dissimilar glass and Kovar alloy without optical contact using femtosecond laser pulses. J. Cent. South Univ. 29, 3422–3435 (2022). https://doi.org/10.1007/s11771-022-5091-9
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DOI: https://doi.org/10.1007/s11771-022-5091-9