Abstract
ZrC coatings were deposited on graphite substrates by low pressure chemical vapor deposition (LPCVD) with the Br2-Zr-C3H6-H2-Ar system. The effects of deposition time on the microstructures and growth behavior of ZrC coatings were investigated. ZrC coating grew in an island-layer mode. The formation of coating was dominated by the nucleation of ZrC in the initial 20 minutes, and the rapid nucleation generated a fine-grained structure of ZrC coating. When the deposition time was over 30 min, the growth of coating was dominated by that of crystals, giving a column-arranged structure. Energy dispersive X-ray spectroscopy showed that the molar ratio of carbon to zirconium was near 1:1 in ZrC coating, and X-ray photoelectron spectroscopy showed that ZrC was the main phase in coatings, accompanied by about 2.5mol% ZrO2 minor phase.
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Founded by the National Natural Science Foundation of China (No. 91216302) and the National Program on Key Basic Research Project of the People's Republic of China (No. 2015CB655200)
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Ma, X., Li, Y., Mei, M. et al. Effect of deposition time on microstructures and growth behavior of ZrC coatings prepared by low pressure chemical vapor deposition with the Br2-Zr-C3H6-H2-Ar System. J. Wuhan Univ. Technol.-Mat. Sci. Edit. 32, 284–288 (2017). https://doi.org/10.1007/s11595-017-1593-y
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DOI: https://doi.org/10.1007/s11595-017-1593-y