Abstract
Inertial piezoelectric actuators are widely applied in precision devices with simple structure and accurate movement. However, existing inertial piezoelectric actuators still face the challenges of rollback motion and bulky power supply. In this work, an alternate excitation strategy and a customized small power supply for a bimorph rotary piezoelectric actuator (BRPA) are proposed to solve the problems. The BRPA prototype is designed with a bipedal symmetrical structure, measuring 35 mm in height and 32 mm in diameter, which has a maximum rotation velocity of 0.247 rad/s and a resolution of 0.66 µrad. Thanks to the bipedal symmetrical structure, the friction directions between the driving feet and the rotor can be coordinated to suppress the rollback. The rollback ratio is almost zero when the phase difference of the exciting signal is set as 180°. The customized power supply is designed and manufactured, whose size is 58 mm×56 mm×46 mm. It can output signals for the single step mode and the continuous mode, and they are adopted to excite BRPA to achieve a small stroke with one single step and a large stroke with continuous step, respectively. Then, an experimental system for optical fiber alignment is developed based on the BRPA and the customized small power supply, the experiment has verified the practicability of this work in the precision fields, especially in the miniaturized precision systems.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
Deng J, Liu S, Liu Y, et al. A 2-DOF needle insertion device using inertial piezoelectric actuator. IEEE Trans Ind Electron, 2022, 69: 3918–3927
Zhang S, Liu Y, Deng J, et al. Development of a low capacitance two-axis piezoelectric tilting mirror used for optical assisted micromanipulation. Mech Syst Signal Process, 2021, 154: 107602
Feng Y, Liu J, Li K, et al. Waveform optimization of piezoelectric micro-jet for the control of metal micro-droplet ejection. IEEE Trans Ind Electron, 2022, 69: 3967–3976
Yang G, Yang L, Du J, et al. PN junctions with coupling to bending deformation in composite piezoelectric semiconductor fibers. Int J Mech Sci, 2020, 173: 105421
Zhang J Z, Tan X M. Experimental study on flow and heat transfer characteristics of synthetic jet driven by piezoelectric actuator. Sci China Ser E, 2007, 50: 221–229
Leveziel M, Haouas W, Laurent G J, et al. MiGriBot: A miniature parallel robot with integrated gripping for high-throughput micromanipulation. Sci Robot, 2022, 7: eabn4292
Kim W, Shin D, Chung C C. Microstepping using a disturbance observer and a variable structure controller for permanent-magnet stepper motors. IEEE Trans Ind Electron, 2013, 60: 2689–2699
Rasekh M, Khadem S E. Pull-in analysis of an electrostatically actuated nano-cantilever beam with nonlinearity in curvature and inertia. Int J Mech Sci, 2011, 53: 108–115
Morkvenaite-Vilkonciene I, Bucinskas V, Subaciute-Zemaitiene J, et al. Development of electrostatic microactuators: 5-year progress in modeling, design, and applications. Micromachines, 2022, 13: 1256
Potekhina A, Wang C. Review of electrothermal actuators and applications. Actuators, 2019, 8: 69
Mohith S, Upadhya A R, Navin K P, et al. Recent trends in piezoelectric actuators for precision motion and their applications: A review. Smart Mater Struct, 2020, 30: 013002
Wang L, Chen W, Liu J, et al. A review of recent studies on non-resonant piezoelectric actuators. Mech Syst Signal Process, 2019, 133: 106254
Zhang S J, Liu Y X, Deng J, et al. A novel sensitive piezoelectric mass balance used for weightless environment. Sci China Tech Sci, 2021, 64: 745–754
Chen Y H, Liu Y D, Liu T S, et al. Design and analysis of an untethered micro flapping robot which can glide on the water. Sci China Tech Sci, 2022, 65: 1749–1759
Deng J, Yang C L, Liu Y X, et al. Design and experiments of a small resonant inchworm piezoelectric robot. Sci China Tech Sci, 2023, 66: 821–829
Zhou T Y, Chen Y, Lu C Y, et al. Integrated lens auto-focus system driven by a nut-type ultrosonic motor (USM). Sci China Ser E-Tech Sci, 2009, 52: 2591–2596
Liu Y, Yan J, Wang L, et al. A two-DOF ultrasonic motor using a longitudinal-bending hybrid sandwich transducer. IEEE Trans Ind Electron, 2019, 66: 3041–3050
Xu Q. Design and development of a flexure-based dual-stage nanopositioning system with minimum interference behavior. IEEE Trans Automat Sci Eng, 2012, 9: 554–563
Zhang S, Zhao H, Ma X, et al. A 3-DOF piezoelectric micromanipulator based on symmetric and antisymmetric bending of a cross-shaped beam. IEEE Trans Ind Electron, 2023, 70: 8264–8275
Kim S C, Kim S H. Precise rotary motor by inchworm motion using dual wrap belts. Rev Sci Instrum, 1999, 70: 2546–2550
Yu H P, Liu Y X, Deng J, et al. A 3-DOF piezoelectric robot with continuous walking gait aiming at cross-scale smooth motion. Sci China Tech Sci, 2023, 66: 233–242
Deng J, Wang W, Zhang S, et al. An inertial bipedal piezoelectric actuator with integration of triple actuation modes. Smart Mater Struct, 2022, 31: 115019
Zhang S, Liu Y, Deng J, et al. Piezo robotic hand for motion manipulation from micro to macro. Nat Commun, 2023, 14: 500
Wen J, Ma J, Zeng P, et al. A new inertial piezoelectric rotary actuator based on changing the normal pressure. Microsyst Technol, 2013, 19: 277–283
Cheng G, Hu Y, Wen J, et al. Piezoelectric inertial rotary actuators based on asymmetrically clamping structures. Sens Actuat A-Phys, 2015, 223: 125–133
Chen K, Wen J, Cheng G, et al. An asymmetrical inertial piezoelectric rotary actuator with the bias unit. Sens Actuat A-Phys, 2016, 251: 179–187
Deng J, Liu Y, Li K, et al. Design, modeling, and experimental evaluation of a compact piezoelectric XY platform for large travel range. IEEE Trans Ultrason Ferroelect Freq Contr, 2020, 67: 863–872
Zhang S, Liu Y, Deng J, et al. Development of a two-DOF inertial rotary motor using a piezoelectric actuator constructed on four bimorphs. Mech Syst Signal Process, 2021, 149: 107213
Wang X, Huang H, Fan H, et al. Evolution of one-stepping characteristics of a stick-slip piezoelectric actuator under various initial gaps. Sens Actuat A-Phys, 2019, 295: 348–356
Tian X, Chen W, Zhang B, et al. Restraining the backward motion of a piezoelectric stick-slip actuator with a passive damping foot. IEEE Trans Ind Electron, 2022, 69: 10396–10406
Deng J, Liu Y, Li J, et al. Influence of multidirectional oscillations on output characteristics of inertial piezoelectric platform. IEEE ASME Trans Mechatron, 2022, 27: 4122–4131
Cheng T, Li H, He M, et al. Investigation on driving characteristics of a piezoelectric stick-slip actuator based on resonant/off-resonant hybrid excitation. Smart Mater Struct, 2017, 26: 035042
Yang Z, Zhou X, Huang H, et al. On the suppression of the backward motion of a piezo-driven precision positioning platform designed by the parasitic motion principle. IEEE Trans Ind Electron, 2020, 67: 3870–3878
Wang Q M, Cross L E. Constitutive equations of symmetrical triple layer piezoelectric benders. IEEE Trans Ultrason Ferroelect Freq Contr, 1999, 46: 1343–1351
Author information
Authors and Affiliations
Corresponding author
Additional information
This work was supported by the National Natural Science Foundation of China (Grant Nos. 52105015 and 52225501), the China Postdoctoral Science Foundation (Grant No. 2021M690830), and the Postdoctoral Science Foundation of Heilongjiang Province, China (Grant No. LBH-Z21018).
Supporting Information
The supporting information is available online at tech.scichina.com and springerlink.bibliotecabuap.elogim.com. The supporting materials are published as submitted, without typesetting or editing. The responsibility for scientific accuracy and content remains entirely with the authors.
Electronic Supplementary Material
Supplementary material, approximately 10.0 MB.
Rights and permissions
About this article
Cite this article
Deng, J., Liu, D., Wang, W. et al. A compact bimorph rotary piezoelectric actuator with customized small power supply. Sci. China Technol. Sci. 67, 1185–1195 (2024). https://doi.org/10.1007/s11431-023-2581-9
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11431-023-2581-9