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Synthesis of a Df-porous Si layer of mesostructure to develop the mechanisms of CO sensors

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Abstract

In this novel current work, double-face porous Si (Df-porous Si) was established via the double-beam laser-assisted etching (DB-LAE) technique, using two similar diode lasers, operating at 630 nm wavelength and 60 mW power. The work involved the development and study of Df-porous Si layer of Al/Psi/Si/Al with one-face, parallel, and series connections and Df-porous Si layer of Al/PSi/ Si/PSi/Al gas sensors under low concentrations (0.25–1 ppm) of CO gas molecules at room temperature. A significant improvement had been achieved in gas sensing characteristics involving current-frequency, sensitivity, stability, and temporal response in Df-porous Si with parallel connections when compared to the Df-porous Si sensors with one-face, and series connections . Low values (0.1, 0.06, and 0.19 ppm) of LOD for CO molecules in one face and Df-porous Si sensors at parallel and series connections were obtained, respectively. These improved characteristics were ascribed to the large sensing area and in parallel connections capacitance of the Df-porous Si layers.

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Data availability

The datasets generated during and/or analyzed during the current study are available from the corresponding author on reasonable request.

Code availability

Not applicable.

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Acknowledgements

The authors gratefully acknowledge the financial and technical support provided by University of Technology& Directorate of Material Research, Ministry of Science and Technology, Baghdad, Iraq. The authors would like to thank Mustansiriyah University (www.uomustansiriyah. edu.iq), Baghdad-Iraq for their support in the present work.

Funding

The authors declare that no funds, grants, or other support were received during the preparation of this manuscript.

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Authors and Affiliations

  1. School of Applied Science, University of Technology, Baghdad, Iraq

    Alwan M. Alwan

  2. Directorate of Material Research, Ministry of Science and Technology, Baghdad, Iraq

    Amer B. Dheyab

  3. Department of Science, College of Basic Education, Mustansiriyah University, Baghdad, Iraq

    Layla A.Wali

  4. Al-Farabi University College, Baghdad, Iraq

    Walid K. Hamoudi

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  1. Alwan M. Alwan
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  2. Amer B. Dheyab
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  3. Layla A.Wali
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  4. Walid K. Hamoudi
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Contributions

All authors contributed to the study conception and design. Material preparation, data collection, and analysis were performed by Alwan M. Alwan, Amer B. Dheyab, Layla A. Wali, and Walid K. Hamoudi The first draft of the manuscript was written by Alwan M. Alwan and all authors commented on previous versions of the manuscript. All authors read and approved the final manuscript.

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Correspondence to Amer B. Dheyab.

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Alwan, A.M., Dheyab, A.B., A.Wali, L. et al. Synthesis of a Df-porous Si layer of mesostructure to develop the mechanisms of CO sensors. J Mater Sci: Mater Electron 35, 1432 (2024). https://doi.org/10.1007/s10854-024-13190-3

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