Abstract
In this chapter, a valveless piezoelectric and magnetic micropump driven by travelling wave is presented. The micropump, fabricated with polydimethylsiloxane (PDMS) and polymethylmethacrylate (PMMA), consists primarily of a saw-tooth microchannel, substrates, and two kinds of integrated actuator arrays (piezoelectric bimorph arrays and NdFeB permanent magnetic arrays). The travelling wave beneath the top wall of the elastic microchannel can be induced by the actuator arrays, and the liquid particles are then transported along with the travelling wave in the microchannel. The micropumps are designed and fabricated with different microchannels (the saw-tooth and the straight microchannels). Appropriate geometry of the saw-toothed microchannel was also studied for optimizing the performance of the micropump. Experimental characterization of the micropump has been performed in terms of the frequency response of the flow rate and back pressure. The results demonstrate that this micropump is capable of generating a stable flow rate in microfluidic systems.
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References
Darabi J, Ohadi MM, DeVoe D (2001) An electrohydrodynamic polarization micropump for electronic cooling. J Microelectromech Syst 10:98–106
Iverson BD, Garimella SV (2008) Recent advances in microscale pumping technologies: a review and evaluation. Microfluid Nanofluid 5:145–174
Jang J, Lee SS (2000) Theoretical and experimental study of MHD (magnetohydrodynamic) micropump. Sensors Actuators 80:84–89
Muralt P (2005) Piezoelectric micromachined ultrasonic transducers based on PZT thin films. IEEE Trans Ultrason Ferroelectr Freq Control 52:2276–2288
Ogawa J, Kanno I, Kotera H et al (2009) Development of liquid pumping devices using vibrating microchannel walls. Sensors Actuators 152:211–218
Olsson A, Stemme G, Stemme E (1996) Diffuser-element design investigation for valveless pumps. Sensors Actuators 57:137–143
Olsson A, Enoksson P, Stemme G et al (1997) Micromachined flat-walled valveless diffuser pumps. J Microelectromech Syst 6:161–166
Olsson A, Stemme G, Stemme E (2000) Numerical and experimental studies of flat-walled diffuser elements for valveless micropumps. Sensors Actuators 84:165–175
Schwarz US, Balaban NQ, Riveline D et al (2002) Calculation of forces at focal adhesions from elastic substrate data: the effect of localized force and the need for regularization. Biophys J 83:1380–1394
Wang C, Zhang W, Liu RP et al (2013) Time-division self-referencing multichannel spectral SPR sensor without mechanical scanning. Electron Lett 49:493–495
Ye WX, Zhang W, Wang C et al (2014) Travelling wave magnetic valveless micropump driven by rotating integrated magnetic arrays. Micro Nano Lett 9:232–234
Zengerle R (1995) A bidirectional silicon micropump. Sensors Actuators 50:81–86
Zhang W, Wang C, Yue Z et al (2011) Travelling-wave piezoelectric micropump with low resistance microchannel. Electron Lett 47:1065–1066
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© 2017 Springer Nature Singapore Pte Ltd.
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Liu, G., Zhang, W. (2017). Travelling-Wave Micropumps. In: Huang, QA. (eds) Micro Electro Mechanical Systems. Micro/Nano Technologies, vol 2. Springer, Singapore. https://doi.org/10.1007/978-981-10-2798-7_29-1
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DOI: https://doi.org/10.1007/978-981-10-2798-7_29-1
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Publisher Name: Springer, Singapore
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Online ISBN: 978-981-10-2798-7
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