Abstract
Silicon hyperdoped with chalcogens using femtosecond (fs) laser irradiation (“black silicon”) shows strong broad-band absorption due to intermediate band formation and surface texturing; thus, this material has promise for advanced optoelectronic devices such as silicon-based infrared photodetectors and intermediate band solar cells. To reduce structural defects and form a rectifying junction after fs laser irradiation, however, annealing is necessary, which deactivates the optical effect of the dopant. Here, we investigated the use of laser-based optical annealing using nanosecond (ns) excimer pulses and found that it removes amorphous material resulting from the black silicon fabrication process while maintaining high above-bandgap and sub-bandgap absorption. We also studied the effect of ns optical annealing on the surface morphology of black silicon.
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FormalPara AbstractSilicon hyperdoped with chalcogens using femtosecond (fs) laser irradiation (“black silicon”) shows strong broad-band absorption due to intermediate band formation and surface texturing; thus, this material has promise for advanced optoelectronic devices such as silicon-based infrared photodetectors and intermediate band solar cells. To reduce structural defects and form a rectifying junction after fs laser irradiation, however, annealing is necessary, which deactivates the optical effect of the dopant. Here, we investigated the use of laser-based optical annealing using nanosecond (ns) excimer pulses and found that it removes amorphous material resulting from the black silicon fabrication process while maintaining high above-bandgap and sub-bandgap absorption. We also studied the effect of ns optical annealing on the surface morphology of black silicon.
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© 2015 Springer Science+Business Media Dordrecht
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Franta, B., Pastor, D., Aziz, M., Mazur, E. (2015). Optical Annealing of Black Silicon. In: Di Bartolo, B., Collins, J., Silvestri, L. (eds) Nano-Structures for Optics and Photonics. NATO Science for Peace and Security Series B: Physics and Biophysics. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-9133-5_39
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DOI: https://doi.org/10.1007/978-94-017-9133-5_39
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