Abstract
A 3-RRR compliant parallel mechanism based on Multi-Notched Flexure Hinges (MNFH) is designed in this study. According to the inverse kinematics of the 3-RRR parallel mechanism, the length of the rod is determined, and a 3-RRR compliant mechanism with workspace larger than the circle with a radius of 70um is designed. Then the Jacobian matrix of the mechanism is solved by the closed loop vector method, and the working space, input coupling and maximum stress of the mechanism are analyzed by using finite element simulation via ANSYS. Compare with the mechanism with traditional right circular flexure hinges (RCFH), the input coupling property of the stage based on MNFH is better, which is well validated by the simulation and experimental studies.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Similar content being viewed by others
References
Y. K. Yong, S. O. Moheimani, B. J. Kenton, and K.K. Leang, ‘Invited Review Article: High-Speed Flexure-Guided Nanopositioning: Mechanical Design and Control Issues’, Rev Sci Instrum, 83 (12101), 1-22 (2012).
Kam K. Leang, and Andrew J. Fleming, ‘High-Speed Serial-Kinematic Spm Scanner: Design and Drive Considerations’, Asian Journal of Control, 11, 144-153 (2009).
Brian J. Kenton, and Kam K. Leang, ‘Design and Control of a Three-Axis Serial-Kinematic High-Bandwidth Nanopositioner’, IEEE/ASME Transactions on Mechatronics, 17, 356-369 (2012).
Qingsong Xu and Zeyi Wu, ‘Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages’, Actuators, 7(5), 1-20 (2018).
Paros JM, ‘How to Design Flexure Hinges’, Mach Des, 37, 151-56 (1965).
Tinghai Cheng, Meng He, Hengyu Li, Xiaohui Lu, Hongwei Zhao, and Haibo Gao, ‘A Novel Trapezoid-Type Stick-Slip Piezoelectric Linear Actuator Using Right Circular Flexure Hinge Mechanism’, IEEE Transactions on Industrial Electronics, 64, 5545-5552 (2017).
Nicolae Lobontiu, Jeffrey S. N. Paine, Ephrahim Garcia, and Michael Goldfarb, ‘Corner-Filleted Flexure Hinges’, Journal of Mechanical Design, 123, 346-352 (2001).
Nicolae Lobontiu, Jeffrey S. N. Paine, Edward O’Malley, and Marc Samuelson, ‘Parabolic and Hyperbolic Flexure Hinges: Flexibility, Motion Precision and Stress Characterization Based on Compliance Closed-Form Equations’, Precision Engineering, 26, 183-192 (2002).
Y. Tian, B. Shirinzadeh, and D. Zhang, ‘Closed-Form Compliance Equations of Filleted V-Shaped Flexure Hinges for Compliant Mechanism Design’, Precision Engineering, 34, 408-418 (2010).
Min Liu, Xianmin Zhang, and S. Fatikow, ‘Design and Analysis of a High-Accuracy Flexure Hinge’, Rev Sci Instrum, 87(055106), 1-13 (2016).
Min Liu, and Xianmin Zhang, ‘Micro-Displacement Amplifier Based on Quasi-V-Shaped Flexure Hinge’, Optics and Precision Engineering, 25, 999-1008 (2017).
Min Liu, Xianmin Zhang, and Sergej Fatikow, ‘Design and Analysis of a Multi-Notched Flexure Hinge for Compliant Mechanisms’, Precision Engineering, 48, 292-304 (2017).
Denny Oetomo, David Daney, Bijan Shirinzadeh, and Jean-Pierre Merlet, ‘Certified Workspace Analysis of 3RRR Planar Parallel Flexure Mechanism’, IEEE International Conference on Robotics And Automation, ICRA, vols 1-9. pp. 1-13, 3838-3843. Pasadena, CA, USA (2008).
Hua Wang, and Xianmin Zhang, ‘Input Coupling Analysis and Optimal Design of a 3-Dof Compliant Micro-Positioning Stage’, Mechanism and Machine Theory, 43, 400-410 (2008).
Acknowledgement
This work is supported by the National Natural Science Foundation of China (Grant No. 51820105007). This support is greatly appreciated.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2019 Springer Nature Switzerland AG
About this paper
Cite this paper
Zhou, A., Zhang, X., Liu, M. (2019). A new kind of Multi-Notched Flexure Hinges Based 3-RRR Micro-Positioning Stage. In: Uhl, T. (eds) Advances in Mechanism and Machine Science. IFToMM WC 2019. Mechanisms and Machine Science, vol 73. Springer, Cham. https://doi.org/10.1007/978-3-030-20131-9_157
Download citation
DOI: https://doi.org/10.1007/978-3-030-20131-9_157
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-20130-2
Online ISBN: 978-3-030-20131-9
eBook Packages: Intelligent Technologies and RoboticsIntelligent Technologies and Robotics (R0)